Micromechatronics and Applications

Course Description

Micro/nanotechnology has become very important in creating innovative technologies in the fields of ultrahigh precision mechatronics, bio-medical engineering and energy/environmental technology. This course introduces fundamental aspects of micromechatronics. It involves scaling laws at the micro/nano-scales, electrostatics, piezoelectrics, electromagnetism, measurement tools, materials and fabrication methods, diverse micromechatronic systems and their applications.



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