Automated Handling on the Nanoscale
Speaker:Dr.-Ing. habil. Sergej Fatikow
Division for Microrobotics and Control Engineering (AMiR)
University of Oldenburg, Germany
Date & Time:26 Jun 2009 (Friday) 16:00 - 17:00


The handling of micro- and nanoscale objects with an accuracy in the nanometer range is an important current trend in robotics. It is often referred to as nanohandling and is primarily understood as manipulation of objects, which may include their finding, grasping, moving, tracking, releasing, positioning, pushing, pulling, cutting, bending, twisting, etc. Additionally, many other technologies requiring tool/probe positioning with an accuracy in the nanometer range are also regarded as nanohandling, e.g. material nanocharacterization methods like indentation or scratching; mechanical or electrical measurements on nanoscale objects; nanostructuring of surfaces by deposition or removal of materials, and others. Automated nanohandling is one of the key challenges of microsystem technology and nanotechnology. It will enable high-throughput manufacturing of novel products and open up new application fields.

Current research activities in AMiR include, amongst others, the development of new nanohandling robots; the investigation of novel automated nanohandling strategies; the development of advanced control methods; as well as the investigation of suitable real-time sensing technologies on the nanoscale. In his talk, Prof. Fatikow introduces main approaches for handling objects on the nanoscale. He especially addresses the automated robot-based nanohandling inside a scanning electron microscope (SEM). The latter serves as a powerful vision sensor and a work space for nanohandling robots integrated into the vacuum chamber and equipped with application-specific tools. The focus of the talk is on current research projects and applications being pursued in AMiR. They include automated nanoassembly of AFM supertips inside SEM, handling and characterization of carbon nanotubes (CNT), electron beam induced deposition (EBiD) as a bonding and nanostructuring technology, automation issues in AFM-based nanohandling, and characterization of biological objects by AFM- /nanorobots.