APAC4005 – Micro-/Nano-Systems

Course Description

This course provides an overall introduction to miniaturization and microelectromechanical systems (MEMS) with basic theoretical principles of the scaling in micro/nano-devices. Key fabrication methodology, material, and structural design of MEMS will be introduced. The state-of-the-art applications of MEMS in interdisciplinary fields will also be covered.

Prerequisite

None